| 摘要 |
<p>PROBLEM TO BE SOLVED: To improve yields of a microbridge sensor by expanding an allowable range in the scattering of a difference between resistance values between a pair of resistors. SOLUTION: A pair of resistors 6 and 7 is arranged and formed on a microbridge 3 of a microbridge sensor 1 so that the side thereof higher or lower in the resistance value thereof is at the upstream point of a fluid and the other side thereof at a downstream point thereof. When a straight line diving the intermediate position equally into two of the pair of resistors vertical to the direction (the arrow 5) of the fluid flows is made as symmetrical line 9, the pair of resistors 6 and 7 is linearly symmetrical with the symmetrical line 9 in configuration. The microbridge is also linearly symmetrical with the symmetrical line 9.</p> |
