发明名称 ETCHING SYSTEM AND ETCHING CHAMBER
摘要 The present invention provides an etching system having a plurality of etching chambers (16, 18, 20) disposed about a transfer chamber (14), wherein the etching chambers are adapted to be selectively mounted at different positions with respect to the transfer chamber.
申请公布号 WO0045425(A1) 申请公布日期 2000.08.03
申请号 WO2000US00510 申请日期 2000.02.01
申请人 FREEMAN, RICHARD, J.;WALLACE, JAY, R.;KURONO, YOICHI;LAFLAMME, ARTHUR, H., JR.;BARRISS, LOUISE, SMITH;ONISHI, TADASHI 发明人 FREEMAN, RICHARD, J.;WALLACE, JAY, R.;KURONO, YOICHI;LAFLAMME, ARTHUR, H., JR.;BARRISS, LOUISE, SMITH;ONISHI, TADASHI
分类号 H01L21/00;(IPC1-7):H01L21/00 主分类号 H01L21/00
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