MASTER PLATE OF OPTICAL MEMORY DEVICE AND MANUFACTURING METHOD THEREOF

摘要

A master plate of an optical memory device has a substrate having on a surface thereof a plurality of guiding grooves with a predetermined interval. The respective edge portions of the guiding grooves are inclined with respect to the surface of the substrate at an angle not more than 30.degree.. According to a manufacturing method for the master plate, the post-baking process is carried out at a baking temperature of not less than 150.degree.C, and an etching gas containing .degree.2 gas of 4 (SCCM) to 10 (SCCM) is used. Thus, even when the copying is carried out with respect to the substrate of the optical memory device according to the injection molding process, wherein the stamper used is manufactured based on the above-mentioned master plate, the mold release of the stamper can be carried out without being caught by the substrate. Thus, it is possible to keep the respective shapes of the guiding grooves of the stamper, thereby enabling the substrate of the optical memory device to be manufactured with high repeatability.