Heat transfer plate for a showerhead electrode assembly of a capacitively coupled plasma processing apparatus

摘要

A heat transfer plate useful in a showerhead electrode assembly of a capacitively coupled plasma processing apparatus. The heat transfer plate includes independently controllable gas volumes which may be pressurized to locally control thermal conductance between a heater member and a cooling member such that uniform temperatures may be established on a plasma exposed surface of the showerhead electrode assembly.

主权项

1. A heat transfer plate for use in a plasma processing chamber, the heat transfer plate comprising a plurality of independently controllable gas volumes configured such that a gas pressure within any given one of the plurality of independently controllable gas volumes does not affect another gas pressure within any other of the plurality of independently controllable gas volumes.