FORMATION OF THIN ITO FILM,申请号JP19930209226-传众专利搜索

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发明名称	FORMATION OF THIN ITO FILM
摘要
申请公布号	JPH0762530(A)	申请公布日期	1995.03.07
申请号	JP19930209226	申请日期	1993.08.24
申请人	SHIMADZU CORP	发明人	YOSHII MITSUYOSHI;ITO SEIJI;IEUJI ATSUSHI
分类号	C23C14/08;C23C14/34;(IPC1-7):C23C14/34	主分类号	C23C14/08
代理机构		代理人
主权项
地址

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