Method to detect wafer arcing in semiconductor manufacturing equipment

摘要

Methods and systems for accurate arc detection in semiconductor manufacturing tools are disclosed. Such methods and systems provide real-time arc detection and near real-time notification for corrective actions during a semiconductor manufacturing process. Such methods and systems utilize data with high sample rate and wavelet analysis to provide for more accurate arc detection, which leads to more effective and cost efficient semiconductor manufacturing operations.

主权项

1. A method comprising:
sampling, by a sensor, data of an electrical parameter associated with an arc event within a semiconductor processing chamber during a semiconductor process; filtering, using discrete wavelet transforms over time for different time windows and frequency bands, the sampled data to generate a time domain arc signal; selecting a predetermined alarm value as a time domain spike threshold for the electrical parameter; comparing the time domain arc signal with the predetermined alarm value; determining whether an arc event occurred based on the comparing; and halting the semiconductor process if it is determined that the arc event occurred.