| 摘要 |
<p>[PROBLEMS TO BE SOLVED] Conventionally, filtering of information measured in the number of product wafers cannot compose a chart. [MEANS FOR SOLVING THE PROBLEMS] Measured data in a plurality of manufacturing devices are time sequential information. The measured data have the number of product wafers and time information. A server device is comprised of an instruction reception unit for storing a plurality of the measured data, and for receiving an output of a chart instruction including the number of the product wafers; an abnormality detecting unit for reading out a plurality of measured data in conformity with conditions of the number of product wafers in clued in the output instruction and for judging whether a plurality of the read out measured data are in conformity with condition information when the instruction reception unit receives the output instruction; an output information composing unit for composing output information in accordance with a judging result of the abnormality detecting unit; and output unit for outputting the output composed by the output composing unit, so that filtering of the information measured in the number of product wafers can compose a chart.</p> |
