| 摘要 |
PROBLEM TO BE SOLVED: To provide a filter device of which a filter can be replaced easily while maintaining an airtight state.SOLUTION: A filter device includes a chamber 1 having a space for distributing gas, and a filter 2 mounted in the chamber 1. The chamber 1 includes a filter replacement port 13, filter lifting means 3 for lifting the filter, and a filter pressing frame 4 to which the lifted filter 2 is pressed. The filter lifting means 3 includes a filter placing part 31 on which the filter 2 is placed, a lifting part 32 mounted on a lower part of the filter placing part 31, and an operation part 33 which is engaged with the lifting part 32, of which a tip end protrudes outside than the chamber 1, and which lifts the lifting part 32 by rotation operation from an outside of the chamber 1.SELECTED DRAWING: Figure 2 |
