| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for measuring permeation of gas permeated through a solid material. SOLUTION: The method of measuring the permeation of the gas permeated through the material M includes a step of forming a mixture of isotope gases, which respectively correspond to target gases for pursuing the gases permeated through the material M and which have mass numbers different from mass numbers of the corresponding target gases, in a mixing casing 14, a step including the first chamber 11 and the second chamber 12, and for filling the first chamber 11 of a permeation casing 10 separated from the second chamber 12 by the material M, with the mixture of the isotope gases, and a step of analyzing the isotope gases existing in the second chamber 12 passed permeatedly through the material M so as to calculate concurrently the permeation of the respective corresponding target gases permeated through the material M. COPYRIGHT: (C)2007,JPO&INPIT |
