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发明名称
Plasma-Verdampfungsquelle für eine Vakuum Beschichtungsanordnung zum Aufbringen von Vergütungsschichten auf optische Substrate.
摘要
申请公布号
CH696179(A5)
申请公布日期
2007.01.31
申请号
CH20000001129
申请日期
2000.06.08
申请人
SATIS VACUUM INDUSTRIES VERTRIEBS - AG
发明人
SUTER RUDOLF
分类号
C23C16/503;H01J37/32
主分类号
C23C16/503
代理机构
代理人
主权项
地址
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