| 摘要 |
PURPOSE: A stage device control system is provided to control an installed stage device using communications network including internet, and to prevent a loss of control of the stage device when a malfunction of an axis controller occurred. CONSTITUTION: A stage device control system comprises the following: a main server(150) directly transmitting an axis controlling signal using an ethernet communication by control data; and an axis controller(160) controlling an axis by the axis controlling signal. The main server includes a main controller and a sub controller for stabilizing a stage device, and directly transmits the axis controlling signal using either the main or the sub controller. The axis controller includes plural one-axis control module(161) controlling only the connected axis. |
