| 摘要 |
A flexible substrate evaporation apparatus comprises at least two rolls (11) for winding and fixing a flexible substrate (10); and a linear source unit (21), located at one side of the flexible substrate (10) between the two rolls (11) for performing evaporation on the flexible substrate (10) between the two rolls (11). An evaporating method adopting the flexible substrate evaporation apparatus comprises the steps of: during the rotation of the rolls (11) to transfer the flexible substrate (10) from one roll (11) to the other roll (11), performing the evaporation on the flexible substrate (10) using the linear source unit (21). |
