POROUS SPIN-ON GLASS COMPOSITION, METHOD OF FORMING THE SAME AND METHOD MANUFACTURING A POROUS SILICON OXIDE LAYER USING THE SAME

摘要

Provided is a porous spin-on glass composition, which forms a porous silicone oxide layer with low dielectric constant to be desired and forms a porous silicon oxide layer with good bonding properties to a lower layer and an upper layer. The porous spin-on glass composition comprises 3-20wt% of silsesquioxane oligomer having a structure of the following formula 1, 3-20wt% of a pore generator, and the balance of solvent. In the formula 1, each of Y1 and Y2 is independently a hydrolyzable alkoxy group, R is a lower alkyl group, and n and m are an integer of 1-9. The alkoxy group is any one selected from the group consisting of methoxide, ethoxide, iso-propoxide, and butoxide.