发明名称 |
METHODS AND APPARATUS FOR A MICROWAVE BATCH CURING PROCESS |
摘要 |
In some embodiments, a process chamber for a microwave batch curing process includes: an annular body having an outer surface and an inner surface defining a central opening of the annular body, wherein the inner surface comprises a plurality of angled surfaces defining a first volume; a first lip extending radially outward from the outer surface of the annular body proximate a first end of the annular body; a second lip extending radially outward from the outer surface of the annular body proximate a second end of the annular body; an exhaust disposed between the first lip and the second lip and fluidly coupled to the first volume, wherein the exhaust comprises a plurality of first openings; a plurality of second openings fluidly coupled to the first volume, wherein the plurality of second openings are configured to expose the first volume to microwave energy; and one or more ports fluidly coupled to the first volume. |
申请公布号 |
WO2016191621(A1) |
申请公布日期 |
2016.12.01 |
申请号 |
WO2016US34489 |
申请日期 |
2016.05.26 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RATHI, Saket;JUPUDI, Ananthkrishna;SUNDARARAJAN, Mukund;VENKATASWAMAPPA, Manjunath Handenahalli |
分类号 |
H01L21/67;H01L21/02;H01L21/205;H01L21/324 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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