| 发明名称 |
Interferometric displacement sensor for integration into machine tools and semiconductor lithography systems |
| 摘要 |
wherein the measurement elements are thermally coupled to the wall of the housing (21) made of heat-conducting material. |
| 申请公布号 |
IL248504(D0) |
申请公布日期 |
2016.12.29 |
| 申请号 |
IL20160248504 |
申请日期 |
2016.10.26 |
| 申请人 |
ATTOCUBE SYSTEMS AG;ZECH Martin;THURNER Klaus |
发明人 |
ZECH Martin;THURNER Klaus |
| 分类号 |
G01B |
主分类号 |
G01B |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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