| 发明名称 |
METAL COMPLEXES CONTAINING AMIDOIMINE LIGANDS |
| 摘要 |
Metal complexes containing one or more amidoimine ligands, methods of making such metal complexes, and methods of using such metal complexes to prepare metal-containing films are provided.; |
| 申请公布号 |
US2016273106(A1) |
申请公布日期 |
2016.09.22 |
| 申请号 |
US201415032559 |
申请日期 |
2014.10.24 |
| 申请人 |
SAFC HITECH INC. |
发明人 |
KANJOLIA Ravi;GARRATT Shaun;THOMPSON David;ANTHIS Jeffrey |
| 分类号 |
C23C16/455;H01L21/285;C23C16/34;C23C16/40;C07F13/00;C23C16/18 |
主分类号 |
C23C16/455 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A metal complex of Formula I: wherein R1, R2, R2′, and R3 are independently selected from the group consisting of alkyl and aryl; M is a metal selected from Groups 7-10 of the periodic table or is copper; and L comprises at least one ligand. |
| 地址 |
Haverhill MA US |
