发明名称 DISK CLAMPING AND ROTATING DEVICE
摘要 Disclosed is a disk clamping and rotating device. A set of fixed clamping jaws and movable clamping jaws are arranged in the circumferential direction of a movable base respectively. Each movable clamping jaw is arranged corresponding to a fixed clamping jaw. By magnets arranged on the movable clamping jaws and the two sides thereof in the rotating direction respectively, the movable clamping jaws are driven to rotate back and forth around the rotating centres thereof respectively through the magnetic function of homopolar repulsion between the adjacent magnets. Therefore, disks placed on the fixed clamping jaws are clamped or released. The disk clamping and rotating device has the advantages that the structure is simple, the action control mode is convenient and reliable, clamping force can be controlled, and the device is compatible with various fabrication processing cavities.
申请公布号 WO2016107131(A1) 申请公布日期 2016.07.07
申请号 WO2015CN83727 申请日期 2015.07.10
申请人 BEIJING SEVENSTAR ELECTRONIC CO., LTD. 发明人 ZHANG, BAO;JI, DANDAN;WANG, RUITING;WU, YI
分类号 H01L21/687 主分类号 H01L21/687
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