| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor testing device capable of preventing breakage of a test object, while clarifying an exchange time of a mechanical relay. SOLUTION: This device is equipped with a power source module 2 for generating a prescribed voltage, an application line 11 for applying an output voltage from the voltage source unit 10 to the test object 30 through the contact type mechanical relay 20, a detection line 31 for feeding back the voltage applied to the test object to the unit through a semiconductor relay 32, and a CPU 16 having a deterioration determination means for determining deterioration of the mechanical relay based on both terminal voltage of the mechanical relay generated by operation of a mechanical relay contact and on a current flowing in the application line 11. COPYRIGHT: (C)2008,JPO&INPIT
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