| 摘要 |
PROBLEM TO BE SOLVED: To provide a structure which does not cause cracking of an inner tube due to ultraviolet light distortion, in an excimer lamp having a light permeable outer tube, and an inner tube to flow a cooling medium, where a discharge space formed between the outer tube and inner tube is filled with discharging gas for forming excimer molecules, an outer electrode is provided on the outer surface of the outer tube, and an inner electrode is provided on the inner surface of the inner tube.SOLUTION: The outer tube is made of silica glass, the inner tube is made of ceramic, and the outer and inner tubes are bonded and sealed by a low melting point metal using a cap member.SELECTED DRAWING: Figure 1 |
