发明名称 PRECISION MASK FOR DEPOSITION AND ITS MANUFACTURING METHOD, ELECTROLUMINESCENT DISPLAY DEVICE AND ITS MANUFACTURING METHOD, AND ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a precision deposition mask which is easily aligned with a glass substrate when applying a vapor deposition to an emitting layer or the like of an organic EL display, is sufficient in strength and can form an accurate vapor deposition pattern, to provide a method for easily and accurately manufacturing the precision deposition mask, to provide an organic EL display device and its manufacturing method, and to provide an electronic apparatus with the organic EL display device. SOLUTION: The precision mask has first beams 3 which are arranged parallel at predetermined intervals and form a plurality of first openings 2 and one or a plurality of second beams 5 which are arranged to intersect with the first beams 3 on the first beams 3 and form a plurality of second openings 4, in which the first beams 3 and the second beams 5 are connected by the intersections. COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008208460(A) 申请公布日期 2008.09.11
申请号 JP20080065310 申请日期 2008.03.14
申请人 SEIKO EPSON CORP 发明人 YOTSUYA SHINICHI;KUWABARA TAKAYUKI
分类号 C23C14/04;C23C14/12;C23C14/24;H01L51/50;H05B33/10 主分类号 C23C14/04
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