| 摘要 |
SOLUTION: In a polishing device 2 with a holder 11 of a polishing object 1, the holder 11 comprises: a ring-shaped frame material 13 which is supported by a holding surface plate 5 and surrounds the polishing object 1; and a holding part 12 which is arranged on an inner side of the frame material and holds the polishing object 1. Friction reducing sheets 14 are disposed between the holding surface plate 5 and the holding part 12 so that the holding part 12 rotates relative to the holding surface plate 5 by using the friction reducing sheets 14.EFFECT: Durability of a holding part can be improved, while satisfactory surface flatness of a polishing object is maintained.SELECTED DRAWING: Figure 3 |
