| 摘要 |
The purpose of the present invention is to reduce noise of a detection circuit for a sensor system. In one aspect of the present invention, a high-sensitivity sensor system is provided with: an acceleration sensor; a detection circuit system that detects an output from the acceleration sensor; a feedback circuit system having a reference voltage power supply for generating, on the basis of an output from the detection circuit system, feedback signals to be fed back to the acceleration sensor; and a correction circuit system. The correction circuit system is provided with: a reference power supply fluctuation detection circuit that detects fluctuation components from the reference voltage of the reference voltage power supply; an output signal error calculation circuit, to which an output from the reference power supply fluctuation detection circuit is inputted, and which calculates a fluctuation component change occurred during a time until the output of the detection circuit system is performed via the acceleration sensor; and an operation circuit that subtracts the output of the output signal error calculation circuit from the output of the detection circuit system. |
