| 摘要 |
Provided is a pellicle container for a large pellicle in the length of at least one edge of greater than 1000 mm in which a longitudinal dimension is changed less and the cleanliness of the inside thereof is not deteriorated even when the pellicle container is used for a long period. The pellicle container (10) accommodating a rectangular pellicle in the length of at least one edge of greater than 1000 mm comprises a pellicle accommodation container main body (11) accommodating a pellicle and a lid (12), wherein the pellicle accommodation container main body (11) and the lid (12) are made of a resin with an absorption rate of less than or equal to 0.2% (JIS K7209, grade A, and a material thickness of 3mm, 24h). It is preferable that the rein material used in the present invention has less than or equal to 0.5% after 30 days (JIS K7209, grade A, and a material thickness of 3mm). The pellicle accommodation container main body (11) may be made of a metal material instead of a resin material. |
