发明名称 |
Vapor axial deposition apparatus and vapor axial deposition method |
摘要 |
Disclosed is a vapor axial deposition apparatus. The vapor axial deposition apparatus includes a first torch, a second torch, a temperature measuring unit and a controller unit. The first torch deposits soot on a distal end of a soot preform aligned with a vertical axis to thereby grow a core. The second torch deposits soot on an outer circumferential surface of the core to thereby grow a clad. The temperature measuring unit detects the temperature distribution of an end portion of the soot preform along the vertical axis. The controller unit determines first and second relative maximum temperatures T 1 and T 3, and relative minimum temperature T 2 between T 1 and T 3 in the detected temperature distribution, and controls T 1 to be within a predetermined range and the greater one of the difference (T 1 -T 2 ) and (T 3 -T 2 ) to not exceed a predetermined temperature.
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申请公布号 |
US2007084248(A1) |
申请公布日期 |
2007.04.19 |
申请号 |
US20060516205 |
申请日期 |
2006.09.06 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD |
发明人 |
KIM JIN-HAING;LEE HO-JIN;DO MUN-HYUN;SEONG JAE-HYEON;KIM YUN-HO |
分类号 |
C03B37/07;C03B37/018;F27B1/26 |
主分类号 |
C03B37/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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