APPARATUS AND METHOD FOR MANUFACTURING NANOSCALE THREE-DIMENSIONAL STRUCTURE

摘要

The present invention relates to an apparatus and a method for manufacturing a nanoscale three-dimensional structure. The apparatus for manufacturing a nanoscale three-dimensional structure according to the present invention is an apparatus for manufacturing a nanoscale three-dimensional structure using a nanofocused printing method and comprises: a first work part for coating a substrate with a sacrificial layer according to a first control signal; a second work part for, according to a second control signal, irradiating a focused ion beam and forming a three-dimensional structure frame by means of the irradiated focused ion beam; a third work part for accumulating nanoparticles, using a focused printing method, on the three-dimensional structure frame according to a third control signal; a fourth work part for removing, according to a fourth control signal, the sacrificial layer remaining on the substrate on which the nanoparticles are accumulated; a transport part for transporting, according to a transport signal, the substrate in order to provide the substrate to any one of the first work part, the second work part, the third work part, and the fourth work part; and a control part for storing a process plan and for generating the first control signal, the second control signal, the third control signal, the fourth control signal, and the transport signal according to the process plan.