| 摘要 |
PROBLEM TO BE SOLVED: To provide a light beam measuring device capable of responding also to wave front measurement of a light beam of low coherence, and facilitating regulation of an optical system and installation of a phase shift mechanism. SOLUTION: The light beam measuring device 1A has a wave front measuring section 10A and a spot characteristic measuring section 10B. The wave front measuring section 10A has an Michelson type optical system arrangement having a reflection type wave front shaping unit 20, a luminous flux separation/multiplexing surface 15, a reflecting plate 17, and an optical length regulating means. A first optical length returning from the luminous flux separation/multiplexing surface 15 through a reflecting surface 17a to the luminous flux separation/multiplexing surface 15 is substantially matched with a second optical length returning from the luminous flux separation/multiplexing surface 15 through the reflection type wave front shaping unit 20 to the luminous flux separation/multiplexing surface 15, thereby allowing two measurements, namely wave front measurement of the light beam of low coherence and spot characteristic measurement of the light beam. COPYRIGHT: (C)2007,JPO&INPIT
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