Capacitive pressure transducer

摘要

In a capacitive pressure transducer of the type having a flexible diaphragm, a "dimple" like or concave surface is formed therein in order to provide an air gap between the flexible diaphragm and a relatively rigid plate. When pressure is applied to the diaphragm, the diaphragm deflects providing a measurable change in capacitance which varies as a function of the applied pressure.