发明名称 |
Semiconductor wafer container |
摘要 |
This invention relates to a semiconductor wafer container having an air filter for removing fine particles from air, which serves to allow air to pass through a body of the container. This causes atmospheric pressure within and without the container body to be substantially identical to each other whereby dirty air is never introduced into the container body.
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申请公布号 |
US4666479(A) |
申请公布日期 |
1987.05.19 |
申请号 |
US19850753577 |
申请日期 |
1985.07.10 |
申请人 |
TENSHO ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
SHOJI, KIKUCHI |
分类号 |
H01L21/673;(IPC1-7):B01D53/02 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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