MECHANISM FOR DETECTING SUBSTRATE IN CASSETTE

摘要

PURPOSE:To easily carry in and out cassettes, surely detect the presence of a substrate without permitting the cassette to collide with the light projecting part or the light receiving part and eliminate the breakage of substrates due to colliding one another. CONSTITUTION:Light projecting and receiving parts 2 and 3 which constitute a substrate presence detecting sensor are provided at the front and rear of a cassette 1 which contains substrates, and the light receiving part 3 or the light projecting part 2 is arranged on a lift mechanism 4.