| 摘要 |
<p>PURPOSE: To place a film used for evaluating a state of exposure flat on a table where a work is mounted so as to evaluate a state of exposure. CONSTITUTION: A film flattening apparatus 20 which hermetically holds a light transmitting special film coated with a thin film formed of material colored by irradiation with ultraviolet rays is placed on a Zθtable 3, the light transmitting specific film is flattened by evacuation with a vacuum chuck mechanism 26, and a state of exposure is evaluated by observing the density distribution of a pattern which is formed on the specific film by coloring.</p> |
