| 发明名称 |
MASS FLOW CONTROLLER |
| 摘要 |
Flow display circuit of the mass flow controller, where display to the digital value the flow that read from MFC (mass flow controller). The said circuit consists of a computer, a D/A converter, a sample hold menas, and a comparing means. |
| 申请公布号 |
KR970009164(B1) |
申请公布日期 |
1997.06.07 |
| 申请号 |
KR19910024217 |
申请日期 |
1991.12.24 |
| 申请人 |
HYUNDAI ELECTRONICS IND.CO. |
发明人 |
OH, SEUNG-HYO;LEE, KI-HO;RYU, HONG-KI;LEE, JAE-JIN |
| 分类号 |
G06F19/00;(IPC1-7):G06F15/46 |
主分类号 |
G06F19/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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