SUBSTRATE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To easily attach and detach a detachable attachment member and improve the work efficiency of periodically carried out maintenance work by fastening the detachable attachment member and a member to which the detachable attachment member is attached by a magnet. SOLUTION: The lower end part of a liquid discharge pipe 9b or of a gas discharge pipe 9c of a lower cup which is a detachable attachment member is fastened to the upper end part of a liquid discharge hose 15 or of a gas discharge hose 17 which is a member to which the detachable attachment member is attached by a fastening mechanism 19. The fastening mechanism 19 is constituted of an upper part and a lower part fastening mechanisms 21, 23 and the upper fastening mechanism 21 is constituted by forming a recessed part 21b in the lower end part of the liquid discharge pipe 9b or the gas discharge pipe 9c, installing a circular magnet 21c in the recessed part 21b, and installing a cover part 21d as to cover the magnet 21c. Fastening is carried out by attracting divided electrodes 23c formed in the lower fastening mechanism 23 by the magnetic 21c. Consequently, the liquid discharge pipe 9b or a gas discharge pipe 9c can easily be attached or detached.