| 摘要 |
PURPOSE: An X-ray generating apparatus is provided to be capable of generating a parse-purpose X-ray without having a high vacuum pump and of parsing a highly integrated semiconductor device by adjusting a spot size of the X-ray. CONSTITUTION: A main body part(10) has an electronic beam moving path(16) formed therein and an open part formed at one side. A target part(30) consists of the first target(24) for generating the first X-ray of a predetermined spot size in response to an incident electronic beam, the second target(26) for generating the second X-ray larger than the spot size and fixed at a rear surface of the first target, and the third target(28) for generating the third X-ray of a spot size less than that of the second X-ray and fixed at a rear surface of the second target. The target part closes the open part so as to maintain the moving path at a vacuum state. A field emission gun(14) is installed in the electronic beam moving path and generates an electronic beam at the moving path. An electronic beam bent unit(20) is formed around the moving path so as to curve the electronic beam from the gun and adjust a spot shape of an electronic beam incident to the first target. A detector(22) detects a backscattered electron generated by reaction of the electronic beam scanned to the first target and generates an electric signal corresponding to a surface image of the first target.
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