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发明名称
PATTERN FORMING METHOD
摘要
申请公布号
JPH02109330(A)
申请公布日期
1990.04.23
申请号
JP19880261945
申请日期
1988.10.18
申请人
FUJITSU LTD
发明人
TANAKA HIROYUKI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
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代理人
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