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发明名称
SUPATSUTASOCHI
摘要
申请公布号
JP2634339(B2)
申请公布日期
1997.07.23
申请号
JP19910263778
申请日期
1991.10.11
申请人
APURAIDO MATERIARUZU INC
发明人
MORITA KATSUMI
分类号
C23C14/35;H01L21/203;(IPC1-7):H01L21/203
主分类号
C23C14/35
代理机构
代理人
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