| 摘要 |
<p>A substrate transfer device and an operating method thereof capable of carrying in/out a thin-sheet substrate to/from a cassette by means of air stream transferring without using a transfer means coming in direct contact with the substrate during the carrying in/out operation. Specifically, a substrate transfer device used to carry in/out a thin-sheet substrate to/from a cassette for storing the substrate, characterized by comprising an air stream transfer hand having in a transfer surface facing the rear surface of the substrate a plurality of air jetting ports provided with a function of floating or landing the substrate, capturing or launching the substrate or centering the substrate, and a cassette mount having, in an integrated structure, a cassette pedestal provided with a means for mounting the cassette thereon and horizontally moving back and forth the cassette with respect to the air stream transfer hand and also a means for vertically moving the cassette pedestal at a preset pitch.</p> |
