发明名称 CONCENTRATION MEASURING DEVICE, OXIDIZING-FORCE MEASURING DEVICE AND DEVICE FOR OXIDIZING BOARD TO BE TREATED
摘要 PROBLEM TO BE SOLVED: To provide a concentration measuring device with which the concentration of peroxosulfuric acid and ozone in a solution is measured. SOLUTION: The concentration measuring device is provided with light source lamps 111, 121, an optical cell 106 filled with the solution through which beams of light from the lamps 111, 121 are transmitted, a first measurement-side light-receiving element 113 which measures the intensity of light, in a wavelength region of 190 nm transmitted through the solution inside the optical cell 106, a first absorbance-measuring part 115 which finds absorbance in the wavelength region of 190 nm on the basis of the measured intensity of light, a second measurement-side light-receiving element 123 which measures the intensity of light at a wavelength close to 254 nm transmitted through the cell 106, a second absorbance measuring part 125 which finds an absorbance at the wavelength near 254 nm on the basis of the measured intensity of light and a conversion part 131 which finds the concentration of the ozone and peroxosulfuric acid in the solution to be measured, on the basis of the respective absorbances found in the two absorbance-measuring parts.
申请公布号 JP2002236092(A) 申请公布日期 2002.08.23
申请号 JP20010029783 申请日期 2001.02.06
申请人 EBARA CORP;TOSHIBA CORP 发明人 SAITO TAKAYUKI;HARADA MINORU;OZAWA TAKU;TOMITA HIROSHI
分类号 G01N31/00;C01B13/11;G01N21/05;G01N21/11;G01N21/27;G01N21/33;(IPC1-7):G01N21/33 主分类号 G01N31/00
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