CONTROLLING METHOD FOR TEMPERATURE ON THE RAPID THERMAL ANNEAL SYSTEM,申请号KR20040113252-传众专利搜索

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发明名称	CONTROLLING METHOD FOR TEMPERATURE ON THE RAPID THERMAL ANNEAL SYSTEM
摘要
申请公布号	KR20060074499(A)	申请公布日期	2006.07.03
申请号	KR20040113252	申请日期	2004.12.27
申请人	DONGBU ELECTRONICS CO., LTD.	发明人	OH, TAE WON
分类号	H01L21/324	主分类号	H01L21/324
代理机构		代理人
主权项
地址

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