MAKING MULTILAYER 3D CAPACITORS USING ARRAYS OF UPSTANDING RODS OR RIDGES

摘要

In one embodiment, a method for making a 3D Metal-Insulator-Metal (MIM) capacitor includes providing a substrate having a surface, forming an array of upstanding rods or ridges on the surface, depositing a first layer of an electroconductor on the surface and the array of rods or ridges, coating the first electroconductive layer with a layer of a dielectric, and depositing a second layer of an electroconductor on the dielectric layer. In some embodiments, the array of rods or ridges can be made of a photoresist material, and in others, can comprise bonded wires.

主权项

1. A method for making a capacitor, the method comprising:
providing a substrate having a surface; forming at least one upstanding rod or ridge on the surface; depositing a first layer of an electroconductor on the surface and on the at least one rod or ridge; coating the first electroconductive layer with a layer of a dielectric; and depositing a second layer of an electroconductor on the dielectric layer.