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发明名称
摘要
申请公布号
FR2683395(B1)
申请公布日期
1995.04.28
申请号
FR19910013686
申请日期
1991.11.06
申请人
COMMISSARIAT ENERGIE ATOMIQUE
发明人
RICHARD CLAUDE;JEAN-FRANCOIS DAVIET;PHILIPPE MONTMAYEUL;LOUISE PECCOUD
分类号
C23C16/458;H01J37/32;H01L21/683;H01R13/24;(IPC1-7):H01R3/00;C23C4/00;H01J37/20;H01J37/248
主分类号
C23C16/458
代理机构
代理人
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