| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measurement device control method that continues copying measurements of a design value with respect to works slightly greater in deviation from the design value.SOLUTION: A shape measurement device control method is configured to: obtain a copying route causing a probe to be moved on the basis of design data on works; move the probe along the copying route; monitor whether a difference between the copying route and an actual work is excessive; when the distance between the copying route and the actual work is excessive, define the difference as an orbit error failure; when the orbit error failure occurs, make a geometric correction to the design data so that the design data comes close to the actual work; and implement a copying measurement on the basis of the design data undergoing the geometric correction.SELECTED DRAWING: Figure 3 |
