发明名称 Method of manufacturing semiconductor device having straight wall bump
摘要 A remaining layer obtained by etching away a half of a resist layer along its depth direction which functions as a mask when a straight wall type bump is formed, is employed as a protection layer for a semiconductor element, so that the surface protection of the semiconductor element can be simply achieved.
申请公布号 US5436198(A) 申请公布日期 1995.07.25
申请号 US19940214655 申请日期 1994.03.11
申请人 ROHM CO., LTD. 发明人 SHIBATA, KAZUTAKA
分类号 H01L21/60;H01L21/321;(IPC1-7):H01L21/441 主分类号 H01L21/60
代理机构 代理人
主权项
地址