| 摘要 |
PROBLEM TO BE SOLVED: To provide a device with excellent reliability capable of suppressing a temp. drift with simple constitution by forming a conductive layer with specific resistance smaller than a specified value on a surface of a pyroelectric substrate and electrically connecting the conductive layer to an electrode layer. SOLUTION: A light modulator S1 consists of the pyroelectric substrate 1, a dielectric layer 3, the conductive layer 5 and electrodes (GND electrode 10a, signal electrode 10b, GND electrode 10c). The pyroelectric substrate 1 on whose one main surface an optical waveguide 2 is formed, and the dielectric layer 3 is formed on one area containing this optical waveguide 2. The conductive layer 5 is formed on a belt like groove 9 formed on the dielectric layer 3 along the optical waveguide 2, and whose specific resistance is smaller than 10<6>Ω.cm. The conductive layer 5 is connected to the electrode layer electrically. This conductive layer 5 forms the groove 9 arriving at the surface of the pyroelectric substrate 1 between the signal electrode 10b and the GND electrode 10a, and between the signal electrode 10b and the GND electrode 10c to be formed on the pyroelectric substrate 1 surface.
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