ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an array substrate for a liquid crystal display device and its manufacturing method, wherein etching steps are not needed and leakage current is prevented. SOLUTION: A gate electrode 131 is formed by using a dual metal layer consisting of copper and a metal which has satisfactory contact characteristics with the substrate and whose pattern solution does not affect the substrate and a source electrode 149 and a drain electrode 151 are formed by using a dual metal layer consisting of copper and a metal by which reaction of a lower ohmic contact layer and copper is prevented. A protective layer 159 is formed on the entire surface of the substrate by using an insulation film. COPYRIGHT: (C)2004,JPO