| 摘要 |
PURPOSE:To facilitate centering work and to reduce energy loss in an apparatus that carries members to be welded from a cooling room to a bonding room connected through a gate valve by providng a centering mechanism for the members to be welded and a heat insulating board in a movable pressing device. CONSTITUTION:Pressing jigs 17A, 17B are attached and lapped on members to be welded A, B and placed on the notched part 16a of a carrying machine 16 squaring their center and the center of the jig 17B. Then, a door 15 is closed and after exhausting the cooling room 12, a gate valve 14 is opened. The carrying machine 16 is moved to the bonding room 11 side and stopped when the center of the notched part 16a coincides with the center of a movable pressing device 21. At this time, a pressing device 21 goes up and penetrates the notched part 16a, and separates lapped jigs and members from the carrying machine 16. In this case, jigs and members A, B are centered, and the center is squared with the center of the notched part 16a, and centered automatically with the pressing device 21. The pressing device 21 is provided with a heat insulating board 22. After the carrying machine 16 goes back to a chamber 12, the valve 14 is closed and the pressing device 21 is raised. The jig 17a is brought into contact with the fixed pressing device 18. Diffusion bonding is performed by a heat generating body 19 after exhausting the chamber 11. |
