Electrode assembly and plasma processing apparatus

摘要

An electrode assembly of a plasma processing apparatus that enables damage to an electrode plate to be prevented, and enables an increase in the number of parts to be prevented, so that the ability to carry out maintenance can be easily maintained. An upper electrode assembly has an upper electrode plate, a cooling plate (C/P) and a spacer interposed between the upper electrode plate and the C/P. The upper electrode plate has therein electrode plate gas-passing holes that penetrate through the upper electrode plate. The C/P has therein C/P gas-passing holes that penetrate through the C/P. The spacer has therein spacer gas-passing holes that penetrate through the spacer. The electrode plate gas-passing holes, the C/P gas-passing holes and the spacer gas-passing holes are not disposed collinearly.

主权项

1. An electrode structure having an electrostatic chuck disposed on an upper surface of a susceptor, the electrostatic chuck including an electrode plate and a pair of insulating layers that sandwich the electrode plate, a DC power source being connected to the electrode plate via a movable connecting member and a connecting terminal, the electrode structure comprising:
a feeder tube connected to the susceptor, the feeder tube constructed by an inner tube and an outer tube, the inner tube functioning as a supply path which supplies radio frequency electrical power to the susceptor, the outer tube functioning as a return path through which the radio frequency electrical power returns from the susceptor, the movable connecting member housed in an inner space of the inner tube of the feeder tube, wherein the connecting terminal is connected to the electrode plate while penetrating through the susceptor, the movable connecting member has therein a feeder rod made of conductive material, in the inner space of the inner tube, an insulating material coil spring houses therein and supports the movable connecting member so that the feeder rod moves together with the movable connecting member integrally, a connecting terminal side end of the feeder rod is exposed, another end of the feeder rod is connected to the DC power source, the movable connecting member is pushed to the connecting terminal by the insulating material coil spring thereby ensuring contact of the connecting terminal and the feeder rod so that a DC voltage is stably applied to the electrode plate.