PROCESS FOR PROCESS CERAMIC DEVICE USING MIXTURE OF PHOTOSENSITIVE RESIN

摘要

PURPOSE: A process for producing a ceramic device of a high precision structure in a simple manufacturing process by patterning a device of a desired form having a multilayered structure using a mixture of metals or ceramic and photosensitive resin by using only an exposing process is provided, which can manufacture a ceramic device having a high shape ratio and has an effect on preventing a short circuit. CONSTITUTION: This process comprises the steps of providing a ceramic substrate; forming a lower electrode at the upper part of the substrate; forming a piezoelectric/electrostrictive layer by using a mixture of metals or ceramic and photosensitive resin at the upper side of the lower electrode; forming an upper electrode using the mixture of metal and photosensitive resin at the upper side of the piezoelectric/electrostrictive layer; and patterning the piezoelectric/electrostrictive layer and the upper electrode by masking the upper electrode in a desired pattern and exposing.