发明名称 CORRECTING METHOD FOR STRAIGHTNESS PRECISION OF MEASURING INSTRUMENT
摘要 PROBLEM TO BE SOLVED: To provide a correcting method for the straightness precision of a measuring instrument capable of solving the defect of the inversion method and capable of obtaining high-reliability measured data without improving an existing device. SOLUTION: This correcting method for the straightness precision of the measuring instrument 1 having linear motion mechanisms includes a straightness precision data calculating process in which a master work MW valued with shape data in advance in measured while a detector 7 is moved by the linear motion mechanism 4, 5 of the measuring instrument 1 and the valued shape data are subtracted from the master work measured data to obtain the straightness precision data of the linear motion mechanisms a work measured data calculating process in which a work is measured while the detector 7 is moved by the linear motion mechanisms of the measuring instrument 1 to obtain the work measured data, and a work shape arithmetic process in which the straightness precision data are subtracted from the work measured data to obtain the true value data of the work.
申请公布号 JP2001201339(A) 申请公布日期 2001.07.27
申请号 JP20000008990 申请日期 2000.01.18
申请人 MITSUTOYO CORP 发明人 OKADA EIJI;OMORI YOSHIYUKI;TSURUTA ATSUSHI;KOJIMA TSUKASA
分类号 G01B5/28;G01B5/20;G01B21/30;(IPC1-7):G01B21/30 主分类号 G01B5/28
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