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发明名称
PLANENESS MEASURING DEVICE
摘要
申请公布号
EP0004036(B1)
申请公布日期
1981.12.23
申请号
EP19790100609
申请日期
1979.03.01
申请人
SIEMENS AKTIENGESELLSCHAFT BERLIN UND MUNCHEN
发明人
DREISBACH, BODO, DIPL.-ING.;EIDLING, KARL
分类号
G01B5/28;G01B5/00;G01B11/30;G01B21/30;(IPC1-7):G01B5/00;H01L21/66;H01L21/68
主分类号
G01B5/28
代理机构
代理人
主权项
地址
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