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发明名称
Vorrichtung zur Messung eines Ionenstrahlpotentials
摘要
申请公布号
DE69209865(D1)
申请公布日期
1996.05.23
申请号
DE19926009865
申请日期
1992.01.16
申请人
EATON CORP., CLEVELAND, OHIO, US
发明人
SFERLAZZO, PIERO, LYNNFIELD, MASSACHUSETTS 01940, US
分类号
C23C14/48;C23C14/54;H01J37/02;H01J37/04;H01J37/244;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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